FORM 3

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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(Print or Type Responses)

1. Name and Address of Reporting Person *   Harris Steven L 2. Date of Event Requiring Statement (Month/Day/Year) 05/15/2008 3. Issuer Name and Ticker or Trading Symbol ELECTRO SCIENTIFIC INDUSTRIES INC [ESIO] (Last) (First) (Middle) 13900 NW SCIENCE PARK DRIVE 4. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner __X__ Officer (give title below) _____ Other (specify below) VP of Research Dev & Eng 5. If Amendment, Date Original Filed(Month/Day/Year) 05/23/2008 (Street) PORTLAND, OR 97229 6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person (City) (State) (Zip) Table I - Non-Derivative Securities Beneficially Owned

1.Title of Security (Instr. 4) 2. Amount of Securities Beneficially Owned (Instr. 4) 3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5) 4. Nature of Indirect Beneficial Ownership (Instr. 5) Common Stock 37,759 D Â

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.			SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 4)	2. Date Exercisable and Expiration Date (Month/Day/Year)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
	Date Exercisable	Expiration Date	Title	Amount or Number of Shares
Incentive Stock Option (right to buy)	  (1)	05/14/2018	Common Stock	6,886	$ 16.58	D	Â
Incentive Stock Option (right to buy)	  (2)	08/14/2013	Common Stock	6,124	$ 16.93	D	Â
Incentive Stock Option (right to buy)	  (3)	07/24/2017	Common Stock	14,000	$ 22.83	D	Â
Non-Qualified Stock Option (right to buy)	  (1)	05/14/2018	Common Stock	6,114	$ 16.58	D	Â
Non-Qualified Stock Option (right to buy)	  (2)	08/14/2013	Common Stock	1,376	$ 16.93	D	Â
Non-Qualified Stock Option (right to buy)	  (4)	07/20/2015	Common Stock	44,000	$ 19.84	D	Â
Non-Qualified Stock Option (right to buy)	  (5)	05/24/2016	Common Stock	15,000	$ 20	D	Â
Non-Qualified Stock Option (right to buy)	  (6)	10/28/2013	Common Stock	10,000	$ 24.52	D	Â
Non-Qualified Stock Option (right to buy)	  (7)	07/12/2014	Common Stock	19,608	$ 25.5	D	Â
Non-Qualified Stock Option (right to buy)	  (6)	04/05/2011	Common Stock	7,085	$ 27	D	Â
Non-Qualified Stock Option (right to buy)	  (6)	04/16/2012	Common Stock	10,190	$ 34.57	D	Â
Non-Qualified Stock Option (right to buy)	  (3)	04/13/2010	Common Stock	7,800	$ 52.75	D	Â

Reporting Owners

Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Harris Steven L 13900 NW SCIENCE PARK DRIVE PORTLAND, OR 97229	Â	Â	  VP of Research Dev & Eng	Â

Signatures

Steven L. Harris		06/04/2008
**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 5(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	The ISO and NQ granted on this date vest together for 25% of the total shares on the first four anniversaries of the grant date.
(2)	The ISO and NQ granted on this date vest together for 25% of the total shares on the first five anniversaries of the grant date. The original grants were for a total of 25,000 shares. The reporting person exercised 17,500 ISO shares prior to becoming subject to Section 16, leaving 6,124 ISO shares exercisable and 1,376 NQ shares exercisable. The original Form 3 reported the total shares originally granted without reflecting the shares already exercised.
(3)	Option becomes exercisable for 25% of the shares on the first four anniversaries of the grant date.
(4)	Option becomes 100% exercisable on 5/26/06. The shares underlying the option are restricted from being sold for a period of 3 years from the grant date.
(5)	Shares under options granted on 5/24/06 become 100% exercisable on 5/26/06. Shares underlying the option are restricted from being sold for a period of 3 years from the grant date. The sale restriction lapses with regard to 1/3 of the total shares on each of the first three anniversaries of the grant date.
(6)	Options become exercisable for 25% of the shares on the first four anniversaries of the grant date. Effective June 28, 2004 the vesting of the option was accelerated to be 100% vested on June 28, 2004. As a result of this vesting acceleration, the original ISO/NQ split of the total shares granted was adjusted if necessary to comply with the IRS limitation.
(7)	The ISO and NQ granted on this date vest together for 25% of the total shares on the first four anniversaries of the grant date. Effective January 25, 2005, the vesting of the option was accelerated to be 100% vested on January 25, 2005. As a result of this vesting acceleration, the original ISO/NQ aplit of the total shares granted was adjusted if necessary to comply with the IRS limitation.

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