Ownership Submission
FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
CHAMBERLAIN ROBERT G
   2. Issuer Name and Ticker or Trading Symbol
ELECTRO SCIENTIFIC INDUSTRIES INC [ESIO] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) __X__ Other (specify below)
Senior Vice President / Senior Vice President
(Last)
(First)
(Middle)
13900 NW SCIENCE PARK DR.		 3. Date of Earliest Transaction (Month/Day/Year)
07/20/2005
(Street)

PORTLAND, OR 97229		 4. If Amendment, Date Original Filed(Month/Day/Year)
 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Common Stock               1,953 D  

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Qualified Stock Option (right to buy) $ 19.84 07/20/2005   A   43,000   05/26/2006(1) 07/20/2015 Common Stock 43,000 (2) 43,000 D  
Incentive Stock Option (right to buy) $ 21.12             01/15/2004(3) 01/14/2013 Common Stock 4,734   4,734 D  
Non-Qualified Stock Option (right to buy) $ 16.93             08/15/2004(4) 08/14/2013 Common Stock 50,000   50,000 D  
Non-Qualified Stock Option (right to buy) $ 21.12             01/15/2004(3) 01/14/2013 Common Stock 21,516   21,516 D  
Non-Qualified Stock Option (right to buy) $ 24.52             10/29/2004(5) 10/28/2013 Common Stock 10,000   10,000 D  
Non-Qualified Stock Option (right to buy) $ 25.5               (5) 07/12/2014 Common Stock 14,216   14,216 D  
Performance Restricted Stock Units Grant $ 0             07/12/2007(6) 07/12/2007 Common Stock 7,385   7,385 D  
Time-Based Restricted Stock Units Grant $ 0             07/12/2009(7) 07/12/2009 Common Stock 9,098   9,098 D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
CHAMBERLAIN ROBERT G
13900 NW SCIENCE PARK DR.
PORTLAND, OR 97229		       Senior Vice President Senior Vice President

Signatures

 By: Kerry Mustoe For: Robert G. Chamberlain   07/22/2005
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Option becomes 100% exercisable on 5/26/06. The shares underlying the option are restricted from being sold for a period of 3 years from the grant date.
(2) No purchase price is paid upon grant of option.
(3) Options become exercisable for 25% of the shares on the first four anniversaries of the grant date.
(4) Options become exercisable for 50% of the shares on the first two anniversaries of the grant date.
(5) Options become exercisable for 25% of the shares on the first four anniversaries of the grant date. Effective June 28, 2004 the vesting of the option was accelerated to be 100% vested on June 28, 2004. As a result of this vesting acceleration, the original ISO / NQ split of the total shares granted was adjusted if necessary to comply with the IRS limitation.
(6) Performance-Based Restricted Stock Units cliff vest after three years following grant date if certain levels of performance are achieved vs. a peer group of companies.
(7) Time-Based Restricted Stock Units vest 20% of the total shares on the first five anniversaries of the grant date.

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