UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549


                                  SCHEDULE 13D
                    Under the Securities Exchange Act of 1934
                                (Amendment No. 5)


                    ELECTRO SCIENTIFIC INDUSTRIES INC. (ESIO)
                                (Name of Issuer)

                                  Common Stock
                         (Title of Class of Securities)

                                    285229100
                                 (CUSIP Number)

                                David Nierenberg
                               The D3 Family Funds
                               19605 NE 8th Street
                                 Camas, WA 98607
                                 (360) 604-8600

                                 With a copy to:

                               Henry Lesser, Esq.
                                DLA Piper US LLP
                             2000 University Avenue
                            East Palo Alto, CA 94303
                                 (650) 833-2000

                  (Name, Address and Telephone Number of Person
                Authorized to Receive Notices and Communications)

                                January 05, 2007
             (Date of Event which Requires Filing of this Statement)

If the filing person has previously filed a statement on Schedule 13G to report
the acquisition that is the subject of this Schedule 13D and is filing this
schedule because of ss.ss. 240.13d-1(e), 240.13d-1(f) or 240.13d-1(g), check the
following box |_|.



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    547,032 Common shares (1.9%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           547,032
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
      For the reporting person listed on this page, 547,032; for all reporting
      persons as a group, 3,159,484 shares (10.8 %)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     10.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!



                                       2



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The DIII Offshore Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    727,274 common shares (2.5%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           727,274
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page,  727,274; for all reporting
     persons as a group, 3,159,484 shares (10.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     10.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       3


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Bulldog Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    1,885,178 common shares (6.5%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           1,885,178
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 1,885,178; for all reporting
     persons as a group, 3,159,484 shares (10.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     10.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       4


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     Nierenberg Investment Management Company, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        3,159,484 shares (10.8%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                     3,159,484 shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 3,159,484; for all reporting
     persons as a group, 3,159,484 shares (10.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     10.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       5


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     Nierenberg Investment Management Offshore, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        727,274 common shares (2.5%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    727,274 common shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON
     For the reporting person listed on this page, 727,274 for all reporting
     persons as a group, 3,159,484 shares (10.8%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     10.8%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!

                                       6



      This  Amendment  No. 5 to  Schedule  13D  (this  "Amendment")  amends  the
below-indicated  items from the Schedule 13D previously filed by or on behalf of
the  undersigned  parties (the  "Reporting  Persons") (the "Schedule  13D"),  by
supplementing such Items with the information below:

Item 4.  Purpose of Transaction

We recently acquired 400,000 more shares of ESIO, after the financial  community
over-reacted,  in our view, to the short term,  fixable declines in ESIO's gross
margin and backlog.  The stock market's myopic obsession with short term and out
of context  fragments of information  causes it to  undervalue,  or even ignore,
good  companies  which have the  potential  to multiply  their share prices over
several  years,  if the market sees the shares as "dead money" over the next one
or two quarters.  Therefore,  we now own over 10.83% of ESIO and believe that we
are ESIO's second largest shareholder.

In our most recent prior Form 13D/A,  we asked ESIO's Board of Directors to cure
the company's excessive capitalization,  and its resulting low return on equity,
by paying the  shareholders  a special  dividend of $4.00 per share.  Because we
believe that the Board will be meeting soon to deliberate about our request,  it
is neither appropriate nor necessary to comment further at this time.

The  only  thing  we will do is  update  our  prior  discussion  about  cash and
marketable  securities  per share from ESIO's  latest Form 10-Q,  for the fiscal
quarter  ended  December  2, 2006.  On its face,  the 10-Q  appears to show that
ESIO's cash and marketable securities per share rose sequentially from $7.33 per
share to $7.46 per share on December 2, even after  investing $5 million cash in
a private company. A close reading of the 10-Q, however,  shows that ESIO has an
additional  $8  million  of  cash,  not  included  in the  cash  and  marketable
securities  lines of the balance sheet,  $1 million from a subsequent  insurance
settlement and $7 million in a litigation  bond in Taiwan,  which increases cash
per  share to $7.73.  Finally,  as  management  volunteered  in their  January 4
quarterly  earnings  conference  call,  the amount of ESIO's  cash  invested  in
inventory  currently  exceeds  their  MBO's  and  will  be  reduced.  Similarly,
receivables are $5.6 million higher than at the beginning of ESIO's fiscal year.
If ESIO were to restore  inventories  and receivables to June 3, 2006 levels (we
believe both  ultimately  can be reduced  even more),  and if we were to add the
above-mentioned  $8 million cash,  ESIO's total cash and  marketable  securities
would be $8.21 per share, 43.2% of ESIO's share price at the close on January 9.
ESIO is  profitable,  cash flow  positive,  and it has zero  debt.  The  company
generated  $9.9  million of net cash from  operating  activities  in the quarter
ended December 2, or 34 cents per share.

In conclusion,  we reiterate why we bought 400,000 more ESIO shares on January 4
and 5, 2007:

      1. We believe that ESIO has excellent management.

      2. ESIO enjoys  world  leading  market  shares in its three major  product
      lines, which give it the potential to earn an attractive return on equity.


                                       7



      3. The combination of organic growth,  increased R&D investment,  a number
      of promising new product releases,  and possible acquisitions could enable
      ESIO to double its revenues over the next three to four years.  Management
      has  shared  this goal with the  public on  several  occasions.  Given the
      company's business model, such growth would drive earnings per share north
      of $2.00,  and, in our view,  ESIO's share price to $40,  more than double
      its current depressed level.

      4. ESIO continues to have a fortress  balance sheet, fed by free operating
      cash flow from profitable operations.

The previous  statements by the Reporting Persons to their views regarding their
investment in ESIO represent  solely their own analyses and judgments,  based on
publicly-available  information and their own internal evaluation thereof. Those
statements are not intended,  and should not be relied on, as investment  advice
to any other investor or prospective  investor.  To the extent those  statements
reflect  assessments of possible  future  developments,  those  assessments  are
inherently  subject to the  uncertainties  associated  with all  assessments  of
future  events;  actual  developments  may  materially  differ  as a  result  of
circumstances  affecting ESIO and/or  extrinsic  factors such as developments in
the  company's  industry and the economic  environment.  The  Reporting  Persons
reserve the right to change their internal  evaluation of this investment in the
future , as well as to increase or decrease their investment  depending on their
evaluation,  without  further  amending their Schedule 13D except as required by
applicable rules.

Item 5.  Interest in Securities of the Issuer

      (a,b) The Reporting Persons, in the aggregate,  beneficially own 3,159,484
common shares, constituting approximately 10.8% of the outstanding shares.

      (c) During the past sixty (60) days the following purchases of Shares were
made by D3 Family Funds in open market transactions:


    Fund                      Transaction Date      Shares Bought      Price
    ----                      ----------------      -------------      -----
D3 Family Bulldog Fund LP         1/4/2007              4,625          19.29
D3 Family Fund LP                 1/5/2007             60,350          19.13
D3 Family Bulldog Fund LP         1/5/2007            242,755          19.13
DIII Offshore Fund LP             1/5/2007             92,270          19.13


                                       8


SIGNATURE

After reasonable inquiry and to the best of my knowledge and belief, each of the
undersigned  certifies that the  information set forth in the Statement is true,
complete and correct.

                                 D3 Family Fund, L.P., and D3 Bulldog Fund, L.P.


                                 By: Nierenberg Investment Management
                                        Company, Inc.

                                 Its: General Partner

January 10, 2007                 By: /s/ David Nierenberg
-------------------------                 ---------------------------
                                         David Nierenberg, President


                                 DIII Offshore Fund, L.P.

                                 By: Nierenberg Investment Management
                                      Offshore, Inc.

                                 Its: General Partner

January 10, 2007                 By: /s/ David Nierenberg
-------------------------                ---------------------------
                                         David Nierenberg, President


                                 Nierenberg Investment Management
                                     Company, Inc.


January 10, 2007                 By: /s/ David Nierenberg
-------------------------                ---------------------------
                                         David Nierenberg, President

                                  Nierenberg Investment Management
                                     Offshore, Inc.

January 10, 2007                 By: /s/ David Nierenberg
-------------------------                ---------------------------
                                         David Nierenberg, President


                                       9