UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                  SCHEDULE 13D
                    Under the Securities Exchange Act of 1934
                                (Amendment No. 3)

                    ELECTRO SCIENTIFIC INDUSTRIES INC. (ESIO)
                                (Name of Issuer)

                                  Common Stock
                         (Title of Class of Securities)

                                    285229100
                                 (CUSIP Number)

                                David Nierenberg
                               The D3 Family Funds
                               19605 NE 8th Street
                                 Camas, WA 98607
                                 (360) 604-8600

                                 With a copy to:

                               Henry Lesser, Esq.
                       DLA Piper Rudnick Gray Cary US LLP
                             2000 University Avenue
                            East Palo Alto, CA 94303
                                 (650) 833-2000

                  (Name, Address and Telephone Number of Person
                Authorized to Receive Notices and Communications)

                                October 24, 2006
             (Date of Event which Requires Filing of this Statement)

If the filing person has previously filed a statement on Schedule 13G to report
the acquisition that is the subject of this Schedule 13D and is filing this
schedule because of ss.ss. 240.13d-1(e), 240.13d-1(f) or 240.13d-1(g), check the
following box |_|.



--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    479,941 Common shares (1.6%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           479,941
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 479,941; for all reporting
     persons as a group, 2,741,384 shares (9.4%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     9.4%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       2


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The DIII Offshore Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    633,275 common shares (2.2%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           633,275
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 633,275; for all reporting
     persons as a group, 2,741,384 shares (9.4%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     9.4%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       3


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     The D3 Family Bulldog Fund, L.P.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    1,628,168 common shares (5.6%)
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        0
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           1,628,168
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    0
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 1,628,168; for all reporting
     persons as a group, 2,741,384 shares (9.4%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     9.4%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       4


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     Nierenberg Investment Management Company, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Washington
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        2,741,384 shares (9.4%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    2,741,384 shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 2,741,384; for all reporting
     persons as a group, 2,741,384 shares (9.4%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     9.4%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       5


--------------------------------------------------------------------------------
1    NAME OF REPORTING PERSON
     S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSON

     Nierenberg Investment Management Offshore, Inc.
--------------------------------------------------------------------------------
2    CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                 (a)  |X|
                                                                 (b)  |_|
--------------------------------------------------------------------------------
3    SEC USE ONLY


--------------------------------------------------------------------------------
4    SOURCE OF FUNDS*

     WC
--------------------------------------------------------------------------------
5    CHECK BOX IF DISCLOSURE OF LEGAL PROCEEDINGS IS REQUIRED
     PURSUANT TO ITEMS 2(d) OR 2(e)                                   |_|


--------------------------------------------------------------------------------
6    CITIZENSHIP OR PLACE OF ORGANIZATION

     Bahamas
--------------------------------------------------------------------------------
               7    SOLE VOTING POWER

                    0
               -----------------------------------------------------------------
  NUMBER OF    8    SHARED VOTING POWER
   SHARES
BENEFICIALLY        633,275 common shares (2.2%)
  OWNED BY     -----------------------------------------------------------------
    EACH       9    SOLE DISPOSITIVE POWER
  REPORTING
   PERSON           0
    WITH       -----------------------------------------------------------------
               10   SHARED DISPOSITIVE POWER

                    633,275 common shares
--------------------------------------------------------------------------------
11   AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

     For the reporting person listed on this page, 633,275; for all reporting
     persons as a group, 2,741,384 shares (9.4%)
--------------------------------------------------------------------------------
12   CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (11) EXCLUDES CERTAIN SHARES*  |_|


--------------------------------------------------------------------------------
13   PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11)

     9.4%
--------------------------------------------------------------------------------
14   TYPE OF REPORTING PERSON*

     PN
--------------------------------------------------------------------------------
                     *SEE INSTRUCTIONS BEFORE FILLING OUT!


                                       6


      This  Amendment  No. 3 to  Schedule  13D  (this  "Amendment")  amends  the
below-indicated  items from the Schedule 13D previously filed by or on behalf of
the  undersigned  parties (the  "Reporting  Persons") (the "Schedule  13D"),  by
supplementing such Items with the information below:

Item 4. Purpose of Transaction

The reporting  persons have acquired  additional  shares of ESIO for  Investment
since the prior amendment to their Schedule 13D. See Item 5.

The reporting  persons  acquired the shares  because we continue to believe that
there is a substantial gap between ESIO's current market value and its intrinsic
value.  We believe this  valuation gap persists even though the company has fine
management,  a fine board, a sound business  strategy,  leading market shares in
its major business  units,  an attractive  long term growth rate, and a fortress
balance sheet.

In a friendly and  constructive  spirit,  we have recently  shared several ideas
with the company in the hope that these ideas might,  over time,  help close the
gap between  ESIO's market and intrinsic  value.  This dialogue  occurred in two
conversations, summarized below, subsequent to ESIO's annual shareholder meeting
of October 5, one with the Chairman of the Board of Directors and the other with
the CEO, CFO, and the company's  Director of Corporate  Development and Investor
Relations.

In our conversation with the Chairman,  we noted that,  according to ESIO's most
recent proxy statement,  none of the company's  outside directors owned outright
any  shares of the  company's  stock.  We also  expressed  our  belief  that the
financial  community  appears to attribute little value to ESIO's  approximately
$7.50  per  share in cash  when  valuing  the  company.  Finally,  we noted  how
challenging  it is for the company to earn a mid teen's  return on equity (which
we consider achievable) when half the company's equity sits on its balance sheet
in cash and marketable securities which earn only a 5% pre-tax return.

We suggested to the Chairman that the ESIO board  consider  mandating  that each
outside director ultimately,  over a period of time, hold a significant personal
investment in the company's shares,  which could be purchased in the open market
or earned  through board service in lieu of cash fees. We believe large director
shareholding  could more closely align the interests of the company's  directors
and  shareholders  and perhaps  heighten  urgency about driving ESIO to attain a
mid-teens return on equity.  We believe that doing this could help close the gap
between ESIO's market and intrinsic value.

Our  separate   conversation  with  the  CEO,  CFO  and  Director  of  Corporate
Development  and  Investor  Relations  pertained  to  several  other  investors'
apparent  disappointment with ESIO's recently reported quarterly results. During
the company's earnings conference call, several investors expressed surprise and
displeasure  with  the  company's  revenue  guidance,  both  relative  to  their
expectations and to the company's prospective shipments.  This negative reaction
was unfortunate  because it appears to us that ESIO's several years of investing
heavily in  Research &  Development  is  beginning  to pay off in new  products,
increased customer penetration, market share gains, improved revenue growth, and
widening margins.


                                       7


The purpose of our conversation,  however, was to suggest to management that the
shareholders'  disappointment  with the company's  revenue  guidance was neither
unreasonable  nor  unforeseeable.  After  all,  investors  have two  fundamental
preferences:  they  prefer  linear  growth  over  lumpy  growth  and  they  hate
surprises.

Legitimate investor  expectations about linear revenue growth create a challenge
for ESIO for three  reasons:  (1) many ESIO  products  carry seven  figure price
tags,  which  means that small  variations  in the number of units  shipped in a
quarter can drive significant near term revenue fluctuations;  (2) ESIO sells to
a highly  concentrated  set of  customers,  which  means  that  small  near term
variations  in ordering by a single  customer  can drive  significant  near term
revenue  fluctuations;  and (3) ESIO is introducing many big ticket new products
which  customers  will test  thoroughly  before  accepting  and  paying  for the
products.

Therefore we advised  ESIO  management  that they should bend over  backwards to
remind  investors that these innocent  factors can cause  meaningless  near term
fluctuations  in sequential  revenue  growth while the company can  nevertheless
remain on a healthy 15% + long term growth trajectory. In addition, we suggested
that ESIO management consider guiding and characterizing  financial results less
by individual  quarter and more in terms of multi-quarter  moving averages which
could help smooth over insignificant near term fluctuations.  Our belief is that
such  proactive  investor  communication  could avoid the  disappointment  which
occurred in the most recent earnings call.

In conclusion,  we believe that the combination of more proactive communications
with the  investment  community and increased  director  ownership of ESIO stock
could  ultimately  drive ESIO's share price  closer to the  company's  intrinsic
value.

The previous  statements  by the Reporting  Persons as to their views  regarding
this  investment  represent  solely their own analyses and  judgments,  based on
publicly-available  information and their own internal evaluation thereof. Those
statements are not intended,  and should not be relied on, as investment  advice
to any other investor or prospective  investor.  To the extent those  statements
reflect  assessments of possible  future  developments,  those  assessments  are
inherently  subject to the  uncertainties  associated  with all  assessments  of
future  events;  actual  developments  may  materially  differ  as a  result  of
circumstances  affecting ESIO and/or  extrinsic  factors such as developments in
the  company's  industry and the economic  environment.  The  Reporting  Persons
reserve the right to change their internal  evaluation of this investment in the
future , as well as to increase or decrease their investment  depending on their
evaluation,  without  further  amending their Schedule 13D except as required by
applicable rules.

Item 5. Interest in Securities of the Issuer

      (a, b) The Reporting Persons, in the aggregate, beneficially own 2,741,384
common shares, constituting approximately 9.4% of the outstanding shares.

      (c) During the past sixty (60) days the following purchases of Shares were
made by D3 Family Funds in open market transactions:


                                       8


Fund                           Transaction Date     Shares Bought         Price
----                           ----------------     -------------         -----
D3 Bulldog Fund LP                    9/29/2006             8,700         20.19
D3 Bulldog Fund LP                    10/2/2006            50,600         20.24
D3 Bulldog Fund LP                    10/3/2006             9,300         20.00
D3 Bulldog Fund LP                    10/4/2006             2,000         20.11
D3 Bulldog Fund LP                   10/18/2006             5,200         20.22
D3 Bulldog Fund LP                   10/19/2006             3,820         20.30
D3 Bulldog Fund LP                   10/24/2006            18,500         19.81
D3 Family Fund LP                     9/29/2006             8,000         20.19
D3 Family Fund LP                     10/2/2006            35,500         20.24
D3 Family Fund LP                    10/18/2006             5,500         20.22
D3 Family Fund LP                    10/19/2006             1,200         20.30
D3 Family Fund LP                    10/24/2006             5,500         19.81
DIII Offshore Fund LP                 10/2/2006            13,300         20.24
DIII Offshore Fund LP                 10/3/2006             2,000         20.00
DIII Offshore Fund LP                 10/4/2006             1,600         20.11
DIII Offshore Fund LP                10/18/2006             2,665         20.22
DIII Offshore Fund LP                10/19/2006             1,480         20.30
DIII Offshore Fund LP                10/24/2006             7,035         19.81


                                       9


                                    SIGNATURE

After reasonable inquiry and to the best of my knowledge and belief, each of the
undersigned  certifies that the  information set forth in the Statement is true,
complete and correct.

                                     D3 Family Fund, L.P., and D3 Bulldog
                                     Fund, L.P.

                                     By: Nierenberg Investment Management
                                          Company, Inc.

                                     Its: General Partner

October 26, 2006                     By: /s/ David Nierenberg
--------------------                     ---------------------------------
                                         David Nierenberg, President


                                     DIII Offshore Fund, L.P.

                                     By: Nierenberg Investment Management
                                          Offshore, Inc.

                                     Its: General Partner

October 26, 2006                     By: /s/ David Nierenberg
--------------------                     ---------------------------------
                                         David Nierenberg, President


                                     Nierenberg Investment Management
                                       Company, Inc.

October 26, 2006                     By: /s/ David Nierenberg
--------------------                     ---------------------------------
                                         David Nierenberg, President


                                     Nierenberg Investment Management
                                       Offshore, Inc.

October 26, 2006                     By: /s/ David Nierenberg
--------------------                     ---------------------------------
                                         David Nierenberg, President


                                       10